Industrial Chiller Heater Equipment Supplier-LNEYA
SEMICONDUCTOR CHILLERS
Single channel chiller& Dual channel chiller
Temp control range -80℃~225℃
Temp Control Accuracy ±0.05℃
Semiconductor Chillers Description
In the semiconductor manufacturing process, in addition to the mentioned equipment, there are many links that require the support of chillers to ensure temperature control and the accuracy of the process. For example, oxidation/diffusion, photolithography, etching, ion implantation, thin film growth, polishing, used on semiconductor heat sinks, for probe stations, and controlling probe station chuck temperature.
LNEYA temperature control equipment has high precision, intelligent temperature control, and a wide temperature control range, ranging from -100 ℃ to 90 ℃, suitable for the constant temperature control needs of most enterprises. The temperature control accuracy can reach ± 0.05 ℃.
You can tell us where you need to use it. services@lneya.com
+86 18914253067
18914253067
Single channel/dual channel Chiller
-45℃~90℃
Heating within 40 ℃ by the hot air of the gas extraction compressor.
The Chiller circulation system adopts a fully enclosed design and uses a magnetic driven pump.
Chiller 100% helium testing, 100% safety compliance testing to ensure safety and reliability.
Chiller 100% continuous operation of the copying machine after 24 hours
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Double Frequency Conversion FLTZ -30℃~40℃
Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max
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Low Temp Series FLT -100℃~80℃
Temperture accuracy ±0.1℃ Flow control 25~75/min 6bar max
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Conventional Type FLT -45℃~80℃
Temperature control in semiconductor production and testing processesEnsure stable and reliable overall semiconductor process flow from front-end to back-endProduct’s Descriptionchillers that control the processing temperature on the Fab equipment…
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Heat Exchange Chiller ETCU +5℃~90℃
Temperature control in semiconductor production and testing processesEnsure stable and reliable overall semiconductor process flow from front-end to back-endProduct’s DescriptionApplication scenarios of temperature control in semiconductor process…
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| Model | Type | Temp Control Range | Temp Control Accuracy | Cooling Capacity | Multi-channel |
| FLT Series | Water cooling | -45℃~90℃ | ±0.05℃ | 1kw~40kw | Multi channel |
| FLT Series | Water cooling | -100℃~80℃ | ±0.05℃ | 1.5kw~3kw | Single channel |
| FLTZ Series | Water cooling | -30℃~40℃ | ±0.05℃ | 11kw | Single channel |
| ETCU Series | Water cooling | 5℃~90℃ | ±0.05℃ | 5kw~300kw | Single channel |
GAS Cooling Chiller
-110 ℃ ~ -40 ℃
Air volume range: 15m ³/ H~100m ³/ H
Efforts should be made to cool down the corrosion of materials, such as dry compressed air, nitrogen gas, argon gas, etc., and introduce them into the LQ series equipment at room temperature. The resulting materials can reach the standard low temperature and be supplied to the components or heat exchangers for demand testing.
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LQ -40°C~-110°C
Heating Power 2.5kW~25kW Cooling capacity 0.25kW~25kW Power range 6.5kW~50kW
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Thermal Stream/TEMPERATURE FORCING SYSTEM
-120 ℃ ~ +300 ℃
The temperature rise and fall rate is very fast, with a Temperature range of 150 ℃ to -55 ℃<10 seconds, and a maximum flow rate of 30m ³/ H;
Real time monitoring of the actual temperature of the tested IC, achieving closed-loop feedback
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AES -115℃~225℃
Cooling water 0.6m³/h~3m³/h Power range 3.7kW~7.5kW
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Thermal Chuck
Equipped with a cooler, it avoids the consumption of liquid nitrogen, carbon dioxide, etc. Each system includes a chuck and a cold and hot control unit;
Fast temperature rise and fall, constant temperature control, suitable for testing RF devices and high-density power devices.
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MD -75℃～225℃
Temperture accuracy ±0.1℃ Source Power 2.8KW
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waste gas recovery Condensing Unit (VOCs)
Connect the waste water to the equipment through a suction fan, and collect and separate it into a collection tank by reducing the temperature for liquefaction, while discharging other materials;
The condensation recovery process requires cooling the fluoride waste gas below its dew point to condense it into a liquid for easy collection and treatment. A chiller is a device that can provide low-temperature cooling, which can cool fluoride waste gas to a suitable temperature, thereby promoting the smooth condensation process.
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YQH 0℃~-75℃
exhaust gas subber
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Applications
- Cooling photolithography, dry etching
- Cooling the furnace body and walls
- Cooling CVD reaction chambers and equipment
- Cooling targets and PVD equipment
- Cooling ion implantation equipment
- Cool the grinding disc and equipment
- Cooling probe table, grinding disc and equipment
- Cooling packaging equipment and mold
- Fluoride waste gas condensation recovery
chiller for semiconductor fab
chiller with IC tester
chiller with chip aging dryer
for Material manufacturing testing
Advantages
Condenser: micro-channel heat exchanger (air-cooled)plate heat exchanger (water-cooled)
Control system: PLC programmable controller
Communication: RS485 interface Modbus RTU protocol/ Ethernet interface TCP/lP protocol
Shell material: cold-rolled plate spray RAL7035lnsidethe pipeline: stainless steel SUS304,copper, ceramics,silicon carbide,silicone sealant, PTFE
Serial Communication
Remote operation signal input
Alarm, Running status, Signal output
Heating function
Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater.
LNEYA’s industrial chiller cooling equipment is sold globally. Singapore, Malaysia, Japan, South Korea, Australia, various European countries such as Germany, Netherlands, UK, United States, Belgium, Czech Republic, Netherlands, France，India and Qatar etc.
Customized Semiconductor chiller
（LNEYA’s chiller supports both indoor and outdoor options.）
Please leave your process temperature control requirements here
+86 18914253067
18914253067